Plasmatherm 790 PECVD, 2001 Vintage

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Category:

Wafer Processing

Make:

Plasmatherm

Model:

Plasmatherm

Serial Number:

4048

Vintage:

2001

Plasmatherm 790 PECVD non-load lock system Heated lower electrode Water cooled/heated chamber Advanced Energy RF5S 500W 13.56MHz power supply with match work Windows based OS 208V 60A 50/60Hz

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