Product ID # - T1520
Product Information
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| Description: | Process Technology: | |||
| PVD Tool, 200mm. [Chamber A - Pass Thru; B - Cool Down; C - TiN ARC, wide body, PS 12kW; D - TiN ARC, wide body, PS 12kW; E - Orienter/Degas; F - Orienter Degas, Chamber 1 - AlCu, ESC MCA+, PS 18kW; 2 - Ti/TiN, wide body, PS 12kW; 3 - Ti/TiN, wide body, PS 12kW; 4 - blank. Buffer Chamber HP+ Fabworx Robot. Transfer Chamber VHP Fabworx Robot, Neslab Heat Exchangers qty 2. Software Version B8].
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Make: AMAT | |||
| Model: 5500 Endura | ||||
| Serial #: | ||||
| Wafer Size: 200mm | ||||
| Part #: | ||||
| Mfg Year: | ||||
| Date Available: 10-20-2009 | ||||
Images Associated with this product |
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