Product ID # - T1513
Product Information
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| Description: | Process Technology: | |||
| 200 mm Wafer Configuration
Year of Mfg 1995 Narrow Body Load Lock HP Robot Orient/Degas Cool Down Standard Body Chamber ( AL ) Standard Body Chamber ( Cobalt ) Wide Body Chamber ( TiN ) Standard Body Chamber ( Ti ) Cool Down PC II Chamber Orient/Degas AE MD 10K Master Generator AE MDX 20K Master Generator AE MDX 10K Slave Generator RFPP LF-10 Generator Comdel 1001S RF Generator AE MDX L6 Generator AE MDX-L12M Generator CTI-8F Cryo Pump 2 CTI 9600 Compressors Neslab 3 Heat Exchanger AC Box |
Make: AMAT | |||
| Model: 5500 Endura | ||||
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| Mfg Year: 1995 | ||||
| Date Available: 01-01-2009 | ||||
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