Product ID # - T1508

 Product Information

Type: Tool    Category: Wafer Processing    Sub-Category: Other Price: $
Description: Process Technology:
 Configured for 200mm Wafers (two 6” or 8” Cassette Stations)
 Manufactured 2000
 Serviced by OEM While In Production
 Original Spec of 4nm at 1KV with SEM Perspective Imaging
 High Resolution Color Optical Microscope
 SEM 45 Degree Tilt
 Automated Review Flow
 Color MPSI for Enhanced Topography & Material Information.
 SYSTEM OPTION
 Integrated EDX Spectrometer
 Integrated Energy Dispersive X-Ray Spectrometer (Nitrongen Free Cooling)
 SEM Based ADC Package
 Remote Workstation – ability to perform off-line tasks such as Results Analysis and off-line classification.
 SECS-II GEM
  Make: AMAT
  Model: SEM Vision CX
  Serial #:
  Wafer Size:
  Part #:
  Mfg Year: 1998
  Date Available: 02-19-2009

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