Product ID # - T1339

 Product Information

Type: Tool    Category: Metrology & Inspection    Sub-Category: Other Price: Click to Inquire
Description: Process Technology:
System Serial Number 3570
Irvine Optical Serial Number 01147
Software Revision 8.23V
ACS2000 Controller
•Multi-tool functionality including thickness, shape stress, global and site flatness
•Measures 8,700 data points in under 60 seconds
•Thin film stress on patterned or monitor wafers
•Wide range of options including wafer typing
•http://www.kla-tencor.com/substrate/ultragage9500.html
  Make: ADE
  Model: 9500 Ultra Gage
  Serial #:
  Wafer Size:
  Part #:
  Mfg Year:
  Date Available: 08-29-2008

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