Product Information
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| Description: | Process Technology: | |||
| System Serial Number 3570
Irvine Optical Serial Number 01147 Software Revision 8.23V ACS2000 Controller •Multi-tool functionality including thickness, shape stress, global and site flatness •Measures 8,700 data points in under 60 seconds •Thin film stress on patterned or monitor wafers •Wide range of options including wafer typing •http://www.kla-tencor.com/substrate/ultragage9500.html |
Make: ADE | |||
| Model: 9500 Ultra Gage | ||||
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| Date Available: 08-29-2008 | ||||
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