Product ID # - T1225

 Product Information

Type: Tool    Category: Wafer Processing    Sub-Category: PVD Metals - Evaporation Price: Click to Inquire
Description: Process Technology: Interconnect
* AMAT 5500 Endura
* 4 chamber
- Ti (wide body with std magnet)
- TiN (wide body with G12 magnet)
- TiN (wide body with G12 magnet)
- Al (std body with std magnet)
* MFC's - Brooks
* S/W - B8.88
* Computer - V450
* Robot HP/VHP
* Heat exchanger - Neslab III
* Pumps - Ebara A10S & A30W
  Make: AMAT - Applied Materials
  Model: Endura 5500
  Serial #:
  Wafer Size: 200mm
  Part #:
  Mfg Year:
  Date Available: 03-01-2008

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