Product ID # - T1011
Product Information
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| Description: | Process Technology: | |||
| Tencor 4500 Surfscan
Serial Number 1087-182 Non-patterned wafer inspection Capable of up to 6 wafers (150mm) Sensitivity 0.21um defect detection 0.4 ppm Haze Sensitivity Accuracy within 1% Throughput for 150 mm wafers – 60 wph |
Make: KLA Tencor ( K/T ) | |||
| Model: 4500 Surfscan | ||||
| Serial #: 1087-182 | ||||
| Wafer Size: 150mm | ||||
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| Mfg Year: | ||||
| Date Available: 01-01-2008 | ||||
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