Product ID # - T1010
Product Information
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| Description: | Process Technology: | |||
| Prometrix OmniMap NC-110
Non-Contact Metal Film Thickness Measurement Serial Number 95023NC-110 Manufactured 1995 Currently Warehoused • Measures Complex Aluminum and Tungsten Multilayer Metalization Schemes • Realistic Process Control By Measuring Actual Product Wafers • Measurement Range: 1 mΩ2 to 1 Ω2 • Accuracy: ± 1% Over Calibration Range • Precision: < 0.2% (1 σ) • Measurement Speed: 3 Seconds Per Site • Utilized in 8" Production Facility – Capable of Measuring 2" - 8" Wafers • Polar and X/Y Mapping • 1 – 30 Site Programmable Quick Test • Diameter Scans – Up to 625 Sites • 20 Site Precision Test Analysis Capabilities • Contour, 3-D, and Die Mapping w/ Color Coded Warning and Specification Limits • Trend and SQC Charting w/ Color Coded Warning and Specification Limits • Data Correlation to Automatically Convert to Thickness, Bulk Resistivity • Data Combination to Produce Average, Difference, or Ratio Maps • Facilities: o Power: 115 VAC o Vacuum: 30" o CDA: 60 Psi |
Make: KLA Tencor - Prometrix | |||
| Model: NC-110 | ||||
| Serial #: 95023NC-110 | ||||
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| Mfg Year: 1995 | ||||
| Date Available: 10-01-2007 | ||||
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