Product ID # - T1003
Product Information
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| Description: | Process Technology: | |||
| KLA-Tencor 2132
Wafer Defect Inspection System S/N W21XX412D Currently Located in storage • Manufactured: 08/97 • Configured for 150mm wafers • High Speed Multilayer Wafer Inspection For Process Defects. • Array Mode (cell to cell) and Random Mode (all pattern) Inspection Modes * Sensitivity & Inspection Speed Die to Die Mode Sensitivity (um) / Speed (sec/um) 0.60 / 5 0.40 / 15 0.25 / 30 Cell to Cell Mode Sensitivity (um) / Speed (sec/um) 0.50 / 1.5 0.30 / 5 0.20 / 15 • Blanket Film Inspection • Automated Operation • Automatic Wafer Transport with Cassette-to-Cassette Robotic Loading • Tool was under service contract with KLA • KLA did the shutdown and crating |
Make: KLA Tencor ( K/T ) | |||
| Model: 2132 | ||||
| Serial #: W21XX412D | ||||
| Wafer Size: 150mm | ||||
| Part #: | ||||
| Mfg Year: 1997 | ||||
| Date Available: 10-01-2007 | ||||
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