|
Plasmatherm 790 PECVD, 2001 Vintage |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
 |
|
Quantronix DRS 820 |
Quantronix |
DRS 820 or DRS I |
Metrology & Inspection |
|
|
|
|
Rudolph FE III |
Rudolph |
FE III |
Metrology & Inspection |
|
|
|
|
Plasmatherm 790 RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Matrix 105 |
Matrix |
105 |
Ashers |
|
|
|
|
Plasmatherm Dual Chamber 790 PECVD RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Edwards iQDP80/QMB500 |
Edwards |
iQDP80/QMB500 |
|
|
Used |
|
|
#4 Plasmatherm VLR RIE LM/TM, 1996 Vintage |
Plasmatherm |
|
Wafer Processing |
|
|
|
|
Edwards QDP80 |
Edwards |
QDP80 |
Other |
|
|
|
|
SVG 8600 Dual Track Coat/Develop |
SVG |
8600 |
Wafer Processing |
|
|
|
|
Semitool SRD-2405-3-1-E-ML |
Semitool |
SRD-2405-3-1-E-ML |
Wafer Processing |
|
|
|
|
Suss MicroTec Delta 80-RC* |
Suss MicroTec |
Delta 80-RC Coater |
Wafer Processing |
|
|
|
|
Edwards iH1000 Pump |
Edwards |
iH 1000 |
Other |
|
A590-30-945 |
|
|
SVG 8600 3 Track Coat/Develop 100mm |
SVG |
8600 |
Wafer Processing |
100mm |
|
|
|
Rudolph Auto EL Elipsometer |
Rudolph |
Auto EL Elipsometer |
Other |
150mm |
|
|
|
Electroglas 2001 Prober |
Electroglas |
EG 2001 |
Test & Probe |
150mm |
|
|
|
Camalot FX-D |
Camalot |
FX-D |
|
150mm |
|
|
|
Lumonics Wafermark II |
GSI Lumonics |
Wafermark II |
Wafer Processing |
150mm |
|
|
|
Modutek’s Rotary Wafer Etching System |
Modutek |
SPS-620 |
Etch |
150mm |
|
|
|
Karl Suss Ma150CC # 2 |
Karl Suss |
Ma150 CC |
Other |
150mm |
|
|
|
FSM 128 (Frontier Semiconductor) |
Frontier Semiconductor (FSM) |
FSM 128 |
Other |
150mm |
|
|
|
Nikon G5 (5x Reduction Stepper NSR-1505G4C) |
Nikon |
Nikon G5 (5x Reduction Stepper NSR-1505G4C) |
Photo-Lithography |
150mm |
|
|
|
Blue M Hard Bake Oven #1 |
Blue M |
Hard bake Oven |
|
150mm |
|
|
|
BioRad QS-408M |
BioRad |
QS-408M |
Metrology & Inspection |
150mm |
|
|
|
MRL Cyclone C430 LH |
MRL |
Cyclone C430 LH |
Furnaces |
150mm |
|
|
|
Karl Suss Ma150CC |
Karl Suss |
Ma150 CC |
Wafer Processing |
150mm |
|
|
|
Entegris Fluoroware PA194-60MB Wafer Cassettes |
|
Entegris Fluoroware PA194-60MB Wafer Cassettes |
Other |
150mm |
PA194-60MB Wafer Cassettes |
|
|
Oxford PlasmaLab 100 Single chamber RIE etcher |
Oxford |
PlasmaLab 100 |
Etch |
150mm |
219656 |
|
|
GSI Lumonics WaferMark II |
GSI Lumonics |
WaferMark II |
Wafer Processing |
150mm |
|
|
|
C & D/ SVG 8800 Coaters & Developers (5) Available |
SVG |
8800 Coaters and Developers |
Coat/Develop & Tracks |
150mm |
|
|
|
Technos TREX 610T |
Technos |
TREX610T |
Metrology & Inspection |
150mm |
|
|
|
KLA Tencor 7600 |
KLA Tencor |
Tencor Surfscan 7600 |
Metrology & Inspection |
200mm |
|
|
|
KLA EV 300 |
KLA Tencor |
EV 300 |
Metrology & Inspection |
200mm |
|
|
|
KLA Tencor UV-1050 |
KLA Tencor |
UV-1050 |
Metrology & Inspection |
200mm |
|
|
|
EVG 6200 Mask Aligner |
EVG |
6200 |
Photo-Lithography |
200mm |
|
|
|
Thermawave Optiprobe 2600B |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
Suss MicroTec 20T |
Suss MicroTec |
Delta 20T2/150VPO |
Wafer Processing |
200mm |
|
|
|
KLA Tencor P-20 Profiler |
KLA Tencor |
P-20 Long Scan Profiler |
Metrology & Inspection |
200mm |
|
|
|
ThermaWave OP5340 # 2 |
Thermawave |
OP 5340 |
Metrology & Inspection |
200mm |
|
|
|
C & D 8800 Metal Alloy Anneal Station |
SVG |
8800 |
RTP |
200mm |
|
|
|
KLA 6200 Surfscan |
KLA Tencor |
6200 Surfscan |
Metrology & Inspection |
200mm |
|
|
|
Strasbaugh 6EC |
Strasbaugh |
6EC |
CMP |
200mm |
|
|
|
Thermawave OP3290 DUV |
Thermawave |
OP3290 DUV |
Metrology & Inspection |
200mm |
|
|
|
KLA 6200 Surfscan # 1 |
KLA Tencor |
6200 Surfscan |
Metrology & Inspection |
200mm |
0294-284 |
|
|
JEOL JWS 7555-S |
Jeol |
JWS 7555-S |
Metrology & Inspection |
200mm |
|
|
|
Axcelis 200 PCU Photoresist Stabilizer |
Axcelis Fusion |
200 PCU |
Photo-Lithography |
200mm |
|
|
|
Thermawave OP2600B-2 |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
Oxford 100 Plus |
Oxford |
100 Plus |
Wafer Processing |
200mm |
|
|
|
KLA AIT 1 |
KLA Tencor |
AIT I |
Metrology & Inspection |
200mm |
|
|
|
KLA-Thermawave 5340 Optiprobe |
Thermawave |
OP 5340 |
Test & Probe |
200mm |
|
|
|
KLA AIT 1 |
KLA Tencor |
AIT 1 |
Metrology & Inspection |
200mm |
|
|
|
TEL Mark 7 Coat and Develop Track |
Tokyo Electron Corp TEL |
Mark 7 |
Coat/Develop & Tracks |
200mm |
|
|
|
Canon 2500i2 Stepper |
Canon/Anelva |
2500i2 |
Photo-Lithography |
200mm |
Canon 2500i2 Stepper |
|
|
Neslab HX75 |
Neslab |
HX75 |
Other |
200mm |
Used |
|
|
KLA-Tencor 2132 |
KLA Tencor |
2132 |
Test & Probe |
200mm |
|
|
|
Strasbaugh 7AA-II Backgrinder |
Strasbaugh |
7AA-II Backgrinder |
Wet Process |
200mm |
740302 |
|
|
TEL Trias CVD |
Tokyo Electron Corp TEL |
Trias |
|
300mm |
|
|
|
AMAT Enabler 300MM |
AMAT |
Enabler |
Etch |
300mm |
|
|
