|
Plasmatherm VLR ICP |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
 |
|
Plasmatherm/Unaxis VLR ICP Bosch |
Plasmatherm |
|
Wafer Processing |
|
|
|
|
SVG 8600 Dual Track Coat/Develop |
SVG |
8600 |
Wafer Processing |
|
|
|
|
Dynatex DXB 52501 |
Dynatex |
DXB 52501 |
Wafer Processing |
|
|
|
|
Quantronix DRS 820 |
Quantronix |
DRS 820 or DRS I |
Metrology & Inspection |
|
|
|
|
Unaxis 790 Series |
Unaxis |
790 Series |
Wafer Processing |
|
|
|
|
Suss MicroTec Delta 80-RC* |
Suss MicroTec |
Delta 80-RC Coater |
Wafer Processing |
|
|
|
|
MDS Mapper CV92A |
MDS |
CV92A |
Other |
|
|
|
|
Dynatex DXB 52501 |
Dynatex |
DXB 52501 |
Wafer Processing |
|
|
|
|
Semitool SRD-2405-3-1-E-ML |
Semitool |
SRD-2405-3-1-E-ML |
Wafer Processing |
|
|
|
|
Plasmatherm 790 PECVD, 2001 Vintage |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Rudolph FE III |
Rudolph |
FE III |
Metrology & Inspection |
|
|
|
|
Plasmatherm 790 RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
March PM-600 |
March Instruments |
PM-600 Quartz Barrel Asher |
Wafer Processing |
|
|
|
|
Plasmatherm Dual Chamber 790 PECVD RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
SVG 8600 3 Track Coat/Develop 100mm |
SVG |
8600 |
Wafer Processing |
100mm |
|
|
|
KLA AIT UV |
KLA Tencor |
AIT UV |
Metrology & Inspection |
150mm |
|
|
|
Karl Suss Ma150CC |
Karl Suss |
Ma150 CC |
Wafer Processing |
150mm |
|
|
|
C & D/ SVG 8800 Coaters & Developers (5) Available |
SVG |
8800 Coaters and Developers |
Coat/Develop & Tracks |
150mm |
|
|
|
KLA-Tencor AIT II |
KLA Tencor |
AIT II |
Metrology & Inspection |
150mm |
|
|
|
Electroglas 2001 Prober |
Electroglas |
EG 2001 |
Test & Probe |
150mm |
|
|
|
MRL Cyclone C430 LH |
MRL |
Cyclone C430 LH |
Furnaces |
150mm |
|
|
|
Modutek’s Rotary Wafer Etching System |
Modutek |
SPS-620 |
Etch |
150mm |
|
|
|
Technos TREX 610T |
Technos |
TREX610T |
Metrology & Inspection |
150mm |
|
|
|
KLA-Tencor 2132 |
KLA Tencor |
2132 |
Test & Probe |
200mm |
|
|
|
Fusion Semiconductor Systems 202MCU |
Fusion |
202 MCU |
Other |
200mm |
|
|
|
Oxford 100 Plus |
Oxford |
100 Plus |
Wafer Processing |
200mm |
|
|
|
KLA EV 300 |
KLA Tencor |
EV 300 |
Metrology & Inspection |
200mm |
|
|
|
KLA AIT 1 |
KLA Tencor |
AIT I |
Metrology & Inspection |
200mm |
|
|
|
Thermawave Optiprobe 2600B |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
KLA AIT 1 |
KLA Tencor |
AIT 1 |
Metrology & Inspection |
200mm |
|
|
|
C & D 8800 Metal Alloy Anneal Station |
SVG |
8800 |
RTP |
200mm |
|
|
|
KLA Tencor 7600 |
KLA Tencor |
Tencor Surfscan 7600 |
Metrology & Inspection |
200mm |
|
|
|
STS ICP ASE Multiplex |
STS |
ICP ASE Multiplex |
Wafer Processing |
200mm |
|
|
|
Thermawave OP3290 DUV |
Thermawave |
OP3290 DUV |
Metrology & Inspection |
200mm |
|
|
|
Suss MicroTec 20T |
Suss MicroTec |
Delta 20T2/150VPO |
Wafer Processing |
200mm |
|
|
|
Lintec Rad 2500 m/8 |
Lintec |
Rad 2500 m/8 |
Other |
200mm |
|
|
|
MGI Electronics 2001 |
MGI Electronics |
2001 ETI0392A-6-U |
Wafer Processing |
200mm |
|
|
|
Thermawave OP2600B-2 |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
Neslab HX75 |
Neslab |
HX75 |
Other |
200mm |
Used |
|
|
Thermco Maxi Brute* |
Thermco Systems |
Maxi Brute |
Wafer Processing |
200mm |
|
|
|
TEL Trias CVD |
Tokyo Electron Corp TEL |
Trias |
|
300mm |
|
|
|
KLA-Thermawave 5340 Optiprobe |
Thermawave |
OP 5340 |
Test & Probe |
300mm |
|
|
|
AMAT Enabler 300MM |
AMAT |
Enabler |
Etch |
300mm |
|
|
