|
GSI Lumonics WaferMark II |
GSI Lumonics |
WaferMark II |
Wafer Processing |
150mm |
|
 |
|
Varian 3290 (SOLD) |
Varian |
3290 |
Wafer Processing |
150mm |
|
|
|
Gasonics Aura 1000 |
Gasonics |
Aura 1000 |
Ashers |
150mm |
|
|
|
Axcelis Fusion Gemini Polo (SOLD) |
Axcelis |
Gemini Polo |
Wafer Processing |
150mm |
|
|
|
JEOL 7555S |
Jeol |
7555S |
Metrology & Inspection |
200mm |
|
|
|
KLA Tencor 7600 (SOLD) |
KLA Tencor |
Tencor Surfscan 7600 |
Metrology & Inspection |
200mm |
|
|
|
STS ICP ASE Multiplex |
STS |
ICP ASE Multiplex |
Wafer Processing |
200mm |
|
|
|
SSEC 3308 |
Solid State Equipment SSEC |
SSEC 3308 |
Wafer Processing |
200mm |
|
|
|
Suss MicroTec 20T |
Suss MicroTec |
Delta 20T2/150VPO |
Wafer Processing |
200mm |
|
|
|
Strasbaugh 6DF-SP |
|
6DF-SP |
Wafer Processing |
200mm |
|
|
|
TEL MB2-730 (SOLD) |
TEL (Tokyo Electron Corp) |
MB2-730 |
Wafer Processing |
200mm |
|
|
|
ASML 5500/300B (SOLD) |
ASML |
5500/300B |
Wafer Processing |
200mm |
|
|
|
ASML 5500/300C (SOLD) |
ASML |
5500/300C |
Wafer Processing |
200mm |
|
|
|
Speedfam EPX300X (SOLD) |
|
EPX300X |
Wafer Processing |
300mm |
|
|
|
KLA Tencor Alpha Step 200 |
KLA Tencor |
Alpha Step 200 |
Metrology & Inspection |
|
10-02000 |
|
|
Rudolph FE III |
Rudolph |
FE III |
Metrology & Inspection |
|
|
|
|
AG 4100 Heatpulse (SOLD) |
AG Associates |
4100S |
Metrology & Inspection |
150mm |
1E92143 |
|
|
Matrix 105 Ashers |
Matrix |
105 |
Ashers |
|
|
|
|
ADE 9650 (SOLD) |
ADE |
9650 |
Metrology & Inspection |
|
|
|
|
Pfeiffer TMH100C |
Pfeiffer |
TMH100C |
|
|
DN 200 ISO-K, 2P |
|
|
Perkin Elmer 4400 |
Perkin Elmer |
4400 |
Wafer Processing |
|
|
|
|
DNS 80B 2C/3D Track (SOLD) |
DNS |
80B Track |
Wafer Processing |
200mm |
|
|
|
SVG Thermco VTR7000 |
SVG Thermco |
VTR7000 |
Wafer Processing |
|
|
|
|
Ultron Systems UH130 |
Ultron Systems |
UH130 |
Wafer Processing |
150mm |
|
|
|
March PM-600 |
March Instruments |
PM-600 Quartz Barrel Asher |
Wafer Processing |
|
|
|
|
Sierra Therm Reflow Oven |
SierraTherm |
2K9-78C32-6A |
Wafer Processing |
|
|
|
|
Bio-Rad Microscope |
BioRad |
|
Wafer Processing |
|
|
|
|
Bruce Technologies BTU Furnace |
Bruce Technologies |
BTU Furnace |
Wafer Processing |
|
|
|
|
Oxford 100 Plus |
Oxford |
100 Plus |
Wafer Processing |
200mm |
|
|
|
SVG 8600 Dual Track Coat/Develop (SOLD) |
SVG |
8600 |
Wafer Processing |
|
|
|
|
March PX 250 |
March Instruments |
PX 250 |
Wafer Processing |
150mm |
|
|
|
Four Dimensions CV92-A |
|
CV92-A |
Metrology & Inspection |
200mm |
|
|
|
Blue M AGC7-206C |
Blue M |
AGC7-206C |
Wafer Processing |
|
|
|
|
SVG 8600 Polyimide track |
SVG |
8600 |
Wafer Processing |
100mm |
|
|
|
KLA Tencor RS-75 Table Top (Sold) |
KLA Tencor |
RS-75 |
Metrology & Inspection |
|
|
|
|
KLA RS55 TC (SOLD) |
KLA Tencor |
RS55 TC |
Metrology & Inspection |
200mm |
|
|
|
KLA RS-35A (Autoloader) (SOLD) |
KLA Tencor |
RS-35A |
Metrology & Inspection |
|
|
|
|
Canon/Anelva 7100 GT |
Canon/Anelva |
7100-GT |
Wafer Processing |
|
|
|
|
EVG 101 (SOLD) |
EVG |
101 |
Wafer Processing |
200mm |
|
|
|
Hitachi 8820 (SOLD) |
Hitachi |
8820 |
Metrology & Inspection |
200mm |
|
|
|
Alcatel AMS 200* (SOLD) |
Alcatel |
AMS 200 |
Wafer Processing |
|
|
|
|
Suss MicroTec Delta 80-RC* |
Suss MicroTec |
Delta 80-RC Coater |
Wafer Processing |
|
|
|
|
Bede QC200 (SOLD) |
Bede |
QC200 |
Metrology & Inspection |
200mm |
|
|
|
Camalot 5000 (SOLD) |
Camalot |
5000 |
Wafer Processing |
|
|
|
|
Digital Instruments D-7000 (SOLD) |
Digital Instruments |
D-7000 |
Wafer Processing |
|
|
|
|
Technos TREX 610T (SOLD) |
Technos |
TREX610T |
Metrology & Inspection |
150mm |
|
|
|
Electroglas 3100CXE (SOLD) |
Electroglas |
3100CXE |
Test & Probe |
|
|
|
|
K & S 8098 |
Kulicke & Soffa (K&S) |
8098 |
Test & Probe |
200mm |
|
|
|
Dionex DX600 |
|
DX600 |
Other |
|
|
|
|
AMAT ComPass 200 (SOLD) |
AMAT |
ComPass Pro 200 |
Wafer Processing |
200mm |
|
|
|
TEL Trias SPAi (SOLD) |
TEL (Tokyo Electron Corp) |
Trias SPAi |
Wafer Processing |
200mm |
|
|
|
KLA Tencor EV300 (SOLD) |
KLA Tencor |
EV300 |
Other |
|
|
|
|
Mattson Aspen 3 (SOLD) |
Mattson |
Aspen 3 |
Wafer Processing |
300mm |
|
|
|
KLA F5X* |
KLA Tencor |
F5X |
Metrology & Inspection |
|
|
|
|
TDK TAS300 (SOLD) |
TDK Corporation |
TAS300 |
Wafer Processing |
200mm |
|
|
|
Riber Epineat (SOLD) |
Riber |
Epineat |
Other |
|
|
|
|
Rudolph FE-IIID |
Rudolph |
FE-IIID |
Metrology & Inspection |
|
|
|
|
Nikon NSR-S610C (SOLD) |
Nikon |
NSR-S610C |
Wafer Processing |
150mm |
|
|
|
Plasmatherm 790 PECVD, 2001 Vintage |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Plasmatherm 790 RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Plasmatherm Dual Chamber 790 PECVD RIE |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
#4 Plasmatherm VLR RIE LM/TM, 1996 Vintage |
Plasmatherm |
|
Wafer Processing |
|
|
|
|
Plasmatherm VLR ICP |
Plasmatherm |
Plasmatherm |
Wafer Processing |
|
|
|
|
Plasmatherm/Unaxis VLR ICP Bosch |
Plasmatherm |
|
Wafer Processing |
|
|
|
|
Disco DAD 522 Automatic Dicing Saw |
Disco |
DAD 522 |
Other |
200mm |
|
|
|
KLA AIT 1 (SOLD) |
KLA Tencor |
AIT I |
Metrology & Inspection |
200mm |
|
|
|
KLA AIT 1 (SOLD) |
KLA Tencor |
AIT 1 |
Metrology & Inspection |
200mm |
|
|
|
Tokyo Electron P8-XL Prober (SOLD) |
TEL (Tokyo Electron Corp) |
P8-XL |
Test & Probe |
200mm |
|
|
|
Unaxis 790 Series |
Unaxis |
790 Series |
Wafer Processing |
|
|
|
|
Dynatex DXB 52501 |
Dynatex |
DXB 52501 |
Wafer Processing |
|
|
|
|
Semitool SRD-2405-3-1-E-ML |
Semitool |
SRD-2405-3-1-E-ML |
Wafer Processing |
|
|
|
|
Ultron Systems UH114 |
Ultron Systems |
UH114 |
Wafer Processing |
|
|
|
|
Ulvac Z1000 (SOLD) |
Ulvac |
Z1000 |
|
200mm |
|
|
|
Thermco Maxi Brute* |
Thermco Systems |
Maxi Brute |
Wafer Processing |
200mm |
|
|
|
Mattson Aspen II (SOLD) |
Mattson |
Aspen II |
Wafer Processing |
150mm |
|
|
|
ASML 5500/200B (SOLD) |
|
ASML 5500/200B |
Wafer Processing |
200mm |
|
|
|
IPA Vapor Dryer (Marangoni Drying) EMI Vocus Systems (SOLD) |
|
IPA Vapor Dryer (Marangoni Drying) EMI Vocus Systems |
Wafer Processing |
|
|
|
|
ASML 5500/100D (SOLD) |
ASML |
ASML 5500/100D |
Photo-Lithography |
200mm |
|
|
|
ASML 5500/200B (SOLD) |
ASML |
ASML 5500/200B |
Photo-Lithography |
200mm |
|
|
|
ASML 5500/100C (SOLD) |
ASML |
ASML 5500/100C |
Photo-Lithography |
200mm |
|
|
|
Gasonics L3510 (SOLD) |
Gasonics |
L3510 |
Metrology & Inspection |
200mm |
|
|
|
Axcelis Fusion Semiconductor Systems 202MCU (SOLD) |
Axcelis |
202 MCU |
Other |
200mm |
|
|
|
KLA-Tencor AIT II (SOLD) |
KLA Tencor |
AIT II |
Metrology & Inspection |
150mm |
|
|
|
KLA-Tencor Flexus 5400 (SOLD) |
KLA Tencor |
Flexus 5400 |
Metrology & Inspection |
200mm |
|
|
|
FSI Mercury MP |
FSI |
Mercury MP |
Wafer Processing |
200mm |
|
|
|
Thermawave Optiprobe 2600B (SOLD) |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
ASML 5500/200 (SOLD) |
ASML |
ASML 5500/200 |
Photo-Lithography |
200mm |
|
|
|
ASML 5500/250 (SOLD) |
ASML |
ASML PAS 5500/250 |
Photo-Lithography |
200mm |
|
|
|
ASML 5500/275 (SOLD) |
ASML |
ASML PAS 5500/275 |
Photo-Lithography |
200mm |
|
|
|
Novellus C2 Sequel (SOLD) |
Novellus Systems |
(C2) Concept 2 Sequel |
Other |
200mm |
|
|
|
ASML 5500/300 (SOLD) |
ASML |
ASML PAS 5500/300 |
Photo-Lithography |
200mm |
|
|
|
AMAT P5000 |
AMAT |
P5000 |
Other |
150mm |
|
|
|
KLA SP1 (SOLD) |
KLA Tencor |
SP1 Classic |
Test & Probe |
300mm |
|
|
|
AMAT Mirra 3400 (SOLD) |
AMAT |
AMAT Mirra 3400 |
CMP |
150mm |
|
|
|
LAM 4520XL (SOLD) |
LAM |
LAM Research 4520XL |
Etch |
150mm |
|
|
|
LAM 9400 (SOLD) |
LAM |
LAM Research 9400 |
Etch |
200mm |
|
|
|
LAM 9500 (SOLD) |
LAM |
LAM Research 9500 |
Etch |
200mm |
|
|
|
LAM 9600 (SOLD) |
LAM |
LAM Research 9600 |
Etch |
200mm |
|
|
|
ADE 9500 (SOLD) |
ADE |
ADE Ultra Gage 9500 |
Metrology & Inspection |
200mm |
|
|
|
Varian E500 Implanter (SOLD) |
Varian |
E500 |
Implant |
200mm |
|
|
|
Eaton GSD 200 (SOLD) |
Eaton |
GSD 200 |
Implant |
200mm |
|
|
|
Quantronix DRS 820 |
Quantronix |
DRS 820 or DRS I |
Metrology & Inspection |
|
|
|
|
Novellus C3 Speed Chambers (SOLD) |
Novellus Systems |
C3 Speed |
|
300mm |
|
|
|
C & D 8800 Metal Alloy Anneal Station |
SVG |
8800 |
RTP |
200mm |
|
|
|
Thermawave OP2600B-2 (SOLD) |
Thermawave |
OP2600B |
Metrology & Inspection |
200mm |
|
|
|
ASM Epsilon 2000 (SOLD) |
ASM |
Epsilon 2000 |
Epi |
200mm |
|
|
|
KLA-Thermawave 5340C Optiprobe (SOLD) |
Thermawave |
OP 5340C |
Test & Probe |
200mm |
|
|
|
Karl Suss Ma150C |
Karl Suss |
Ma150 C |
Wafer Processing |
150mm |
|
|
|
C & D/ SVG 8800 Coaters & Developers (5) Available (SOLD) |
SVG |
8800 Coaters and Developers |
Coat/Develop & Tracks |
150mm |
|
|
|
Electroglas 2001 Prober (SOLD) |
Electroglas |
EG 2001 |
Test & Probe |
150mm |
|
|
|
KLA 6200 Surfscan (SOLD) |
KLA Tencor |
6200 Surfscan |
Metrology & Inspection |
200mm |
|
|
|
Karl Suss Ma150CC # 2 |
Karl Suss |
Ma150 CC |
Other |
150mm |
|
|
|
KLA 6200 Surfscan # 1 (SOLD) |
KLA Tencor |
6200 Surfscan |
Metrology & Inspection |
200mm |
0294-284 |
|
|
Blue M Hard Bake Oven #1 |
Blue M |
Hard bake Oven |
|
150mm |
|
|
|
Edwards iH1000 Pump |
Edwards |
iH 1000 |
Other |
|
A590-30-945 |
|
|
Rudolph Auto EL Elipsometer |
Rudolph |
Auto EL Elipsometer |
Other |
150mm |
|
|
|
KLA Tencor P-20 Profiler |
KLA Tencor |
P-20 Long Scan Profiler |
Metrology & Inspection |
200mm |
|
|
|
ThermaWave OP5340 # 2 (SOLD) |
Thermawave |
OP 5340 |
Metrology & Inspection |
200mm |
|
|
|
Lumonics Wafermark II |
GSI Lumonics |
Wafermark II |
Wafer Processing |
150mm |
|
|
|
Strasbaugh 6EC |
Strasbaugh |
6EC |
CMP |
200mm |
|
|
|
Nikon G5 (5x Reduction Stepper NSR-1505G4C) |
Nikon |
Nikon G5 (5x Reduction Stepper NSR-1505G4C) |
Photo-Lithography |
150mm |
|
|
|
TEL Mark 7 Coat and Develop Track (SOLD) |
TEL (Tokyo Electron Corp) |
Mark 7 |
Coat/Develop & Tracks |
200mm |
|
|
|
Oxford PlasmaLab 100 Single chamber ICP- RIE etcher |
Oxford |
PlasmaLab 100 |
Etch |
150mm |
219656 |
|
|
Camalot FX-D |
Camalot |
FX-D |
|
150mm |
|
|
|
Disco DAD 3220 Dicing Saw (SOLD) |
Disco |
DAD 3220 |
Other |
150mm |
|
|
|
Disco DAD 3240 Dicing Saw #1 (SOLD) |
Disco |
DAD 3240 |
Other |
200mm |
|
|
|
Disco DAD 3240 Dicing Saw #2 |
Disco |
DAD 3240 |
Other |
200mm |
|
|
|
ThermaWave Thermaprobe TP 630 (SOLD) |
Thermawave |
TP 630 |
Test & Probe |
300mm |
|
|
|
Ultratech 1500 Stepper |
|
UltraStep 1500 |
Photo-Lithography |
150mm |
|
|
|
KLA SFS 6420 Surfscan (SOLD) |
KLA Tencor |
SFS 6420 Surfscan |
Metrology & Inspection |
|
|
|
|
KLA-Thermawave 3260/3290 Optiprobe (SOLD) |
Thermawave |
OP 3290 |
Test & Probe |
200mm |
|
|
|
KLA-Thermawave 2690 Optiprobe |
Thermawave |
OP 2690 |
Test & Probe |
200mm |
|
|
|
Rudolph Metapulse II 200-X Thickness Measurement System |
Rudolph |
Metapulse II 200-X |
Metrology & Inspection |
200mm |
|
|
|
NORDSON ASYMTEK MH-912L MH-900 SERIES LOADER MATERIAL HANDLING AND DISPENSING |
|
MH-912L |
Other |
|
|
|
|
ThermaWave OP 2600 |
Thermawave |
OP 2600 |
Metrology & Inspection |
200mm |
|
|
|
ThermaWave OP 7341 (SOLD) |
Thermawave |
OP 7341 |
Metrology & Inspection |
200mm |
|
|
|
TEL Tokyo Electron Clean Track ACT 8 (SOLD) |
TEL (Tokyo Electron Corp) |
ACT 8 |
Coat/Develop & Tracks |
200mm |
|
|
|
AMAT Applied Materials Centura RTP (SOLD) |
AMAT |
Centura RTP |
RTP |
200mm |
|
|
|
AMAT Applied Materials Centura (SOLD) |
AMAT |
Centura |
Other |
200mm |
|
|
|
Lam 4420XL (SOLD) |
LAM |
4420XL |
Wafer Processing |
200mm |
|
|
|
Lam 4520i (SOLD) |
LAM |
4520i |
Other |
200mm |
|
|
|
Disco DAG 810 (SOLD) |
Disco |
DAG 810 |
Wafer Processing |
200mm |
|
|
|
Disco DFG 8540 (SOLD) |
Disco |
DFG 8540 |
Wafer Processing |
200mm |
|
|
|
SEZ 203 (SOLD) |
SEZ |
203 |
Wet Process |
200mm |
|
|
|
Axcelis 200 ACU Asher |
Axcelis |
200 ACU Asher |
Ashers |
200mm |
|
|
|
K & S 7500 Dicing Saw |
Kulicke & Soffa (K&S) |
7500 |
Other |
150mm |
|
|
|
TEL Lithius Track |
TEL (Tokyo Electron Corp) |
Lithius |
Coat/Develop & Tracks |
300mm |
|
|
|
Teradyne J971 |
Teradyne |
J971 |
Test & Probe |
|
|
|
|
JEOL 7515 |
Jeol |
JWS-7515 |
Metrology & Inspection |
200mm |
|
|
|
TEL Precio Octo (SOLD) |
TEL (Tokyo Electron Corp) |
Precio Octo |
Test & Probe |
200mm |
|
|
|
KLA P2 Profiler |
KLA Tencor |
P2 Profiler |
Metrology & Inspection |
|
|
|
|
KLA Surfscan 4500 |
KLA Tencor |
SFS 4500 Surfscan |
Metrology & Inspection |
|
|
|
|
Gasonics Aura A3000 |
Gasonics |
Aura A3000 |
Ashers |
150mm |
|
|
