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• Manufacturer: Thermawave • Model: 2600B Optiprobe • Wafer Size: 200mm • Thermawave Optiprobe Model 2600B Mainframe • SECS II/GEM 3.0 Interface • Dual bay/chase controls • Bulkhead model with mini environment • Lamp spectrometer special • Full array spectrometer • Diode laser • Beam profile ellipsometer (BPE) • Beam profile reflectometer (BPR) • Objective lens • Robot module rev # ATM-105-1-CE • Pattern recognition subsystem • 1.44MB floppy drive • Vane anemometer for internal airflow testing • X/Y/Theta stage assembly • Ion shower assembly • ULPA filter • Compmotor PC23 stage controller • Additional details available upon request
