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Make:
TEL (Tokyo Electron Corp)
TEL developed the Trias SPAi to reduce greenhouse gas emissions and improve COO through a smaller footprint and higher throughput. It is based on TEL's popular Trias SPA, a low temperature plasma nitridation/oxidation process module installed at major DRAM, Flash and Logic customers worldwide. The Trias SPA creates a high-density, low-electron temperature plasma enabling damage-free processing in advanced radical oxidation and nitridation applications.
