Rudolph FE-IIID Dual Wavelength Focus Ellipsometer
Measurement Console
The Measurement Console contains the following components:
• Measurement system (including vacuum control, stage, lifters,
optical components, and so on).
• Control electronics
• Computer System (including keyboard and trackball pointing
device).
Measurement System
The measurement system, located behind the optics door on top of the
measurement console, includes all of the hardware that actually performs
the film measurements.
Once a wafer is loaded onto the stage, it is detected and held in place by
the vacuum control system. The stage moves the wafer along the x and y
axes to position the desired measurement location under the laser spot.
Once properly positioned, the optical components perform the measurements
as programmed by the Engineer.
The FE System may be configured with either one laser (single wavelength)
or two lasers (dual wavelength).
Control Electronics
The control electronics, located behind the left door panel on the bottom
of the measurement console, includes all of the electronic control modules
(including rectifiers, transformers, and motion control circuitry) that
powers the FE System and contains the logic and drivers for all motion of
the robot, stage, and vacuum chuck.
Computer System The computer system, located behind the right door panel on the bottom
of the measurement console, is an IBM-compatible PC running OS/2.
The computer system is used to set up measurements and calculate the
data results. A VGA monitor (with live video overlay) and a trackball
pointing device are also part of the computer system.
Wafer Handler Console
The Wafer Handler Console provides a storage area and contains the following
components:
• Wafer handler robot arm
• Cassette plates
• Printer (optional)
• External flat/notch finder (FE IV only)
The robot arm is used to transport wafers between a cassette and the
stage in the Measurement Console. Single arm and dual arm robots are
available.
Cassette Plates
The cassette plates hold the wafer cassettes and contain sensors which
are used to automatically determine the size of the wafer cassette that
has been placed upon the plate.
The FE System can be configured with either two or three cassette
plates.
FE System Printer A compartment located behind the door panel on the Wafer Handler Console
provides for additional storage space for the FE System and may
also contain the optional printer for the system.
The printer allows you to generate hard copy of wafer maps and reports
that may be created when measurements are performed.
External Flat/
Notch Finder
The external flat/notch finder, available only on FE IV systems, performs
centering and flat/notch orientation on a wafer prior to the wafer being
loaded onto the stage.
The external flat/notch finder takes up the space normally used by cassette
plate 3, therefore the FE IV system has only two cassette plates.
Monitor
Console
The optional Monitor Console is typically used to provide a mounting surface
for the computer monitor and for working counter space. The interior
of the console can be used for the storage of cassettes, tools, books and
other materials used with the FE System.
