Riber
EPINEAT III V S REQUIREMENTS
Following requirements should be fulfilled for proper installation of the MBE system. These
requirements are applicable to a typical Epineat III -~ V S configuration. They can vary
according to the final configuration (pumping systems, options).
CRATES
Typical dimensions of mates (L x W x H, gross weight): *
. Growth chamber; 2.10 X150 x 2.50 m — 1,670 kg
. Degassing/Buffer + loading and unloading chambers: 1.25 x 1.50 x 2.50 m— l,2]0 kg
.Electrical cabinet (each): L30 x 0.95 x 2.35 m - 925 kg
.Accessories and miscellaneous: 2.10 x 2.10 x 2.00 m ~ 1,200 kg
Note: the above list is typical. The exact number (especially for electrical cabinets), size and
Weight of crates will depend upon the exact system configumtim-1 and the shipping
possibilities.
LABORATORY
2.1 Minimum dimensions of doors 1: I-I = 2.30 m, W = 1.80 m.
The shipping system configuration is defined by the drawing C 52 910.
Allow additional clearance fur access to elevators, etc...
Have equipment ready for system uncrating (forklift).
Large system parts equipped with wheels. Once outside 1l1e crates, they can be pushed on a
horizontal floor.
2.2} Dimensions of the room
See drawings C 52 906 B (top view), C 52 907 A (front view) and 52 908 A (side view).
Allow space for opening electronic racks.
Allow space for one person moving finely around the system.
. Allow space for dismounting components and for use of lifting devices.
In general, you have to foresee 36“ space around the machine.
' Once system is uncrated
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3/
EPINEAT III V S REQUIREMENTS
2.31 Floor resistance
>= 250 daN/cm^2, everywhere the system frames arc moved with their castors.
2.4] Ambiant temperature
Z0 “C 1 5+- C
The system, especially during bakeout, will dissipate an average thermal power of 7 kW in
the room atmosphere.
2.5 / Humidity
Less than 60 %
2.61 Clean room classes
Riber advises to install the system in a clean room with the following classes:
I00 for the load/Unload area; between 100 and 1000 forth: other system components.
2.71 Magnetic field
Less than 50mG peak to peak
ELECTRICAL POWER
Mains: You need one main electrical line connected to one Riber supplied distribution panel.
This main line must have the following characteristics:
3.11 Op crating voltage
3 phase 400 VAC+ 6 “/II-10%
5 wire (3 phase+ neutral + ground).
For another operating voltages, special transformer will be required.
Riber doesn‘t supply the cable between the transformer (screw terminals) and the customer
distribution panel.
Consult Riber for further information.
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EPINEAT H1 V S REQUI_REMENTS
3.2! Frequencies
50 Hz or 60 Hz
The frequency must be defined at the order.
3.3! Current
>= 63 A for each phase
3.4! Ground .
Ground resistance to earth less than 50 ohm
Note l:
Riber does not deliver plug for connection of system to customer distribution panel. It shall
be available at site for the system installation. An electrical box, with internal circuit
breakers, is supplied for the system. Look at drawings C 52 906 E and C 52 907 A to get its
position The system and every electronic rack have a hard-wired grounding conductor, who
shall be connected to the laboratory pound.
Note Z: .
Electronic racks are usually located near the system. The equipment is delivered with cables
and trays for floor installation, according to drawing C 52 906 B.
FLUID AND GAZ
4.1 Corrosion inhibited water
A facility connection plate (for water, compressed air, and technical nitrogen) is located on
the frame of the system, Distribution lines from this panel to the system components are part
of the Riber installation.
Water is also required if a cryopump is on the system, for its water-cooled compressor. The
Riber installation doesn’t include this special water circuit.
Water shall have a pH value of 6.0 lo 8.0 and a calcium carbonate concentration of less than
75 parts per million. .
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EPINEAT III V S REQUIREMENTS
The supply shall satisfy the following requirement:
Relative pressure at inlet connection <= 0.3 MPa;
Water temperature at inlet connection: 20 degrees C (+-) l0 degrees C;
Water flow at inlet connection: >= 10 l/mn, depending on the water temperature rating’ you
want to get.
Water exhaust must he at atmosphere pressure (if B closed loop circuit is used, please contact
Riber for acceptance of your device).
In any case, water shall be corrosion inhibited to secure proper operation of the machine
4.2 Liquid nitrogen
Liquid nitrogen shall he used on the system at several recommended below:
- Growth chamber main cryopanels (two separate cryopanels);
- Growth chamber sublimation well cryopanel;
- Buffer chamber : sublimator on PEG combined ion I sublimation pumps;
Note : This panel may not he cooled or just with water. Alter a short time, the base vacuum
level is always good in this chamber which is never open to atmosphere.
See drawing C 52 909 B for exact location and type of feedthroughs.
The LN; consumption of the growth chamber depends on the use of the system and on the
efficiency of the liquid nitrogen delivery system‘ This system should be carefully insulated,
as thermal leaks result in high nitrogen consumption. The TAL feedthroughs are high
efficiency vacuum-insulated feed troughs and are compatible with existing commercial
closed-loop recirculating systems such as systems made by Vacuum Barrier Corporation.
The cooling ct‘ all panels can he stopped at night with cells at idling temperatures. The own
MBE system consumption can reach 60 liters per hour during growth (in case of closed-lump
recirculating system), depending on the number of heated effusion cells and
cells/manipulator temperatures. _
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EPINEAT III V S REQUIREIVEENTS
4.3 Compressed air
Compressed air should also be provided for operating the pneumatic gale valves il‘
applicable.
A facility connection plate (for water, compressed air, and technical nitrogen) is located on
the frame of the system (see relevant drawing]. Distribution lines from this panel lo the
system components are supplied by Riber.
Requirements: 0.5 MPa <= pressure S 0.6 MPa.
The interface is described by the drawing C $2 906 B.
4.4! Nitrogen gas
One supply of dry nitrogen should be provided for system venting, with following
requirements: .
0.15 l\/[Pa 5 pressure 0.2 MPa;
Purity < 99,999 % (purer is better);
Filtered to eliminate particulates;
The interface is described by the drawing C 52 906 B.
4.5! Exhaust
Exhausts are net supplied I connected by Riber. This include exhausts from the primary
pumping systems, exhaust from cryopump regeneration systems, and exhaust from every
pneumatic actuator (gate valves).
