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Plasmatherm/Unaxis VLR ICP Cassette to Cassette System, (1) LM/TM module single load lock with single endeffector, (1) ICP Bosch module, currently set up for 100mm wafers with ESC chucks,ENI 600W RF power supply for lower electrode with AM5 Matchwork and tuner,Advanced Energy RFPP 10M RF power supply for upper electrode with AM10 matchwork and tuner, Leybold 1000C turbo pump, NT20 controller,VAT PM5 Throttle valve controller, Leybold turbo pump with controller,Heated chamber walls with 6 zone controller, 4 MFCs,Windows OS with Plasmatherm Versaworks software,keyboard and mouse,208V,60A, 60Hz
