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Oxford 100 Plus

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Category: 
Wafer Processing
Make: 
Oxford
Model: 
100 Plus
Serial Number: 
219673
Wafer Size: 
200mm

Oxford 100 Plus RIE system Manual Load lock system Alcatel 600T Turbo pump and controller 13.56MHz RF power supply PLC controller Remote Gas box 208V 25.6A 50/60Hz

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