Nikon Corporation NSR-S610C
Wafer Size: 12 inch (standard)
Wafer Carrier: 12 inch FOUP FOUP maker: Entegris
Load Port: TDK (TAS-300E3)
Pre-alignment orientation: 6:00
Coater/Developer: TEL Lithius i
Reticle Size: 6 inch
Reticle Field Size: 26mm x 33mm
Pod: Single SMIF -POD and Mulit SMIF -POD (holds 6 reticles)
