KLA-Tencor Thermawave OptiProbe 5340C
Complex Thin Film Thickness Measurement
Serial Number: 8197
Vintage: December 2000
65nm IC Production Accuracy
300mm, 200mm, & 150mm Wafers
Win NT
t, k, n Matching of Complex Films
Cognex Pattern Recognition
BPR: Beam Profile Reflectometry
BPE: Beam Profile Ellipsometry
DUV: Deep Ultra-Violet Broad-Band Reflectometer
AE: Absolute Ellipsometer
SE: Spectroscopic Ellipsometer
