RS75 Tabletop
Serial 960625RS75
Refurbished to OEM Specifications
RS-75 Tabletop, Serial 960625RS75
STATTRAX 6.70
Refurbished to OEM Specifications
New Keyboard, trackball, Monitor, repainted apnels
1 Probe (Type A,B,C,D,E,F) included
RS75 SPECIFICATIONS
MEASUREMENT SPECIFICATIONS
• Measurement range: <5 mΩ/sq to >5MΩ/sq • Absolute accuracy: based on NIST (NBS) standard wafers corrected to 23°C:
±1% of NIST certified range
• Measurement repeatability, based on KLA-Tencor's "Probe Qualification Test"
@ 1 in test diameter, using the appropriate probe head: <0.2% (lσ) • Edge exclusion: 5 mm from edge of conductive film with 25 mil probe head,
6 mm from edge of conductive film with 40 mil probe head, 7 mm from edge of conductive film with 62.5 mil probe head • Typical measurement time, based on 49-site test, manually loaded single wafer, with temperature compensation: ≤60 seconds
MEASUREMENT CAPABILITIES
• Routine check: 1-30 sites programmable (ASTM standard tests included) • XY map: up to 1,200 sites programmable • Single or dual configuration capability
ANALYSIS CAPABILITIES
• Contour/3D map: 49, 81, 121, 225, 361, 441, 625 sites • Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites • Probe qualification test: 20 sites, programmable radius • Trend and SQC charts • Histograms • File editing and data extraction capability • Calibration curves for low dose monitoring • Average, difference and ratio maps • Temperature coefficient of resistance curves
DATA TRANSFER
• SECS II or RS232 communication (data upload) • Optional enhanced SECS II
