KLA-Tencor AIT II (SOLD)

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Category:

Metrology & Inspection

Make:

KLA Tencor

Model:

AIT II

Wafer Size:

150mm

Vintage:

1999

EQUIPMENT DETAILS:

AIT 2 Patterned Wafer Inspection System:

- Multi-Spot Optics (5um, 7um and 10um spot sizes)

- Advanced Collection Optics Configuration

- Internal Microscope Review Including:

- Integrated Optical Microscope

- 4 Microscope Objectives Standard (10, 50, 100, 150X)

- Bright Field/Dark Field Viewing

- Auto Focus capability

- Automatic Coordinate Registration and Alignment

- Region Based Multi-Threshold Capability (RBMT)

- Integrated ULPA Filter Package

- High Resolution Color Monitor

- Standard Network Communication Capability:

* Supports Windows NT 4.0 File and Printer Connections

- Supports 10Base-T and BNC (10Base-2)

- Robot Protective Cover

- Low Contact Vacuum Chuck/Locator for 200mm

- "Clean-room White" Tool Skins

- 200mm Dual Paddle Robotic Handler, Single Cassette Platform

UPDGRADE IN 2002:

- 1ea P/N 0027212-000 Field Upgrade Kit, AIT-II to AIT-XP.

-Including:

- 1ea P/N 0037910-000 Upgrade 3 spot Size AIT-II to AIT-XP 3.5um, 5um, 7um.

UPGRADE IN 2003:

- P/N 00190101-000 GEM/SECS and HSMS Interface

Darkfield Inspection

• Currently Configured for 6" wafer size