RS-55 Table Top
Serial Number 9003T1
Refurbished to OEM Specifications
RS-55 Tabletop, Serial Number 9003T1
STATTRAX 6.50
Refurbished to OEM Specifications
New Keyboard, trackball, Monitor
1 Probe (Type A,B,C,D,E,F) included
OmniMap®RS55
Specifications
Measurement Specifications
• Measurement range: <5 mΩ/sq to >5 MΩ/sq • Typical measurement time: 3.5 - 4.5 seconds per test site • Absolute accuracy, based on MST (NBS) standard wafers corrected to 23°C: ±1% of NIST certified range • Measurement repeatability: <0.2% (lσ) • Accommodates all standard wafer sizes: 4,5,6 & 8 inch and 100, 125, 150 and 200 mm • 486/33 MHz computer • 110 MB fixed hard disk • 44 MB removable hard disk • 3.5" floppy disk • High resolution color monitor • Routine check: 1-30 sites programmable • XY map: up to 1200 sites programmable • P-N typing • Single or dual configuration capability
Analysis Capabilities
• Contour/3-D map, diameter scan: 49, 81, 121, 225, 361, 441, 625 sites • Probe qualification test: 20 sites • Diameter scans • Trend and SQC charts • Histograms • File editing and data extraction capability • Calibration curves for low dose monitoring • Average, difference, and ratio maps • Temperature coefficient of resistance curves
Data Transfer
• SECS II or RS232 communication (data
upload)
• Enhanced SECS II for fully automated
operation (optional)
Probe Head
• Precision four point probe head with integrated connector • .040 inch probe spacing; 100 gm loading; tip radius 0.0016, 0.004, or 0.008 inch • .025 inch probe spacing for enhanced spatial resolution; 100 gm loading; 0.0016, 0.004 inch • .0625 inch probe spacing; 200 gm loading; tip radius 0.0016
