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KARL SUSS MA 150CC Mask aligner
Electronic
Power supply: CIC 1200
PC Type: DSM-P233 MMX
Relay inetlock box
TSA-Camera: XC-50
TSA-Abjective: 5 x / 0.15, 10 x / 0.30, 20 x / 0.40
BSK-Microscope: 520R Rechts / Right
BSA-Camera 264537 Rechts / Right
Cognex 5000
Power meter
Exposure optics: UV 400
Prealigner
Prealigner sensor head: SI / GAAS / INP
Mask holder
Chuck
