Hitachi S8820 CD-SEM,SEM Magnification 1,000x to 150,000x,Wafer imaging ability: Entire surface of 8” wafer, Depth of focus: >= 1.0mm at 80,000x magnification,Resolution:5 nm at 800V on CRT,Optical Microscope: Monochrome CCD camera, Fixed Mag of 110x, Workstation, HP 715-64 computer or later model,Multipoint Measurement Function,Edge Roughness Function,Contact Hole Measurement Function,Automated Image Archiving Function,Leybold 50 turbo on loadlock, Leybold 340 turbo on main chamber,Operating Voltage 100 V AC, 50 Amp
