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Type: Automated Mask Aligner
Wafer Size: 8"
Equipment Configuration:
Wafer Configuration: 9″ inch mask holder square, 8″ wafer chuck
Double-sided / Backside Alignment Capability
Manual Load – Motorized illuminator 1000w lamp (joystick)
Manual XYZ stage (coarse and fine adjustments
Includes: PC, Lamp, Mirror and Opt
Tool was operational when de-installed. Call for additional photos and info.
