EQUIPMENT DETAILS:
Tool is equiped with the AIM option.
• Currently configured for 200mm (8”)
• MFG Date: 1996
• Dual unicassette handling
• Two (2) process reactors
• 2 additional MFC's per reactor, UNIT 1660
• Input gas filter per gas channel, metal cintered
• Ionizer for bulkhead system
• PC control system
• Two individual two channel gas panels
• Dual three color signal towers
• Mirror finish, 8RA, stainless steel front bulkhead mount and perforated wafer deck covers
• Fan and ULPA filter
• Optical emission end point detection per chamber
• SECSII and GEM compliance
• High throughput upgrade
