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ASML 5500/100 D i-line Wafer Stepper (Serial Numbers-7488, 8908, 4341)
Wafer size:200mm Flat : Reticle plate size: 6 inch
Field size: 18, 21, and 22mm
Cassette Position 1 & 2
Wafer Track Interface- Tel Mk5/7/8/ ACT 8
SECS 1 and 2 interface
Batch streaming RMS
Image quality control
SW rel 8.8.6
Additional Information and Lens Qualification Data Available upon request
